Inverse lithography source optimization via compressive sensing
نویسندگان
چکیده
منابع مشابه
Compressive Sensing for Inverse Scattering
Compressive sensing is a new field in signal processing and applied mathematics. It allows one to simultaneously sample and compress signals which are known to have a sparse representation in a known basis or dictionary along with the subsequent recovery by linear programming (requiring polynomial (P) time) of the original signals with low or no error [1–3]. Compressive measurements or samples ...
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0167-8655/$ see front matter 2012 Elsevier B.V. A doi:10.1016/j.patrec.2012.02.007 q This work is partially supported by Charles S Research Grant OPA 4818. 1 NICTA is funded by the Australian Government as re of Broadband, Communications and the Digital Econom Council through the ICT Centre of Excellence program. ⇑ Corresponding author. E-mail addresses: [email protected] (J. Gao), q Tiberio.Cae...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2014
ISSN: 1094-4087
DOI: 10.1364/oe.22.014180